High Voltage SMU 2300
Features
- High voltage (3000V@20mA, 1500V@120mA) range
- Charactering as an accurate, fast, agile and easy-handling product.
- Providing 4 quadrants voltage / current output, which accelerates the process of developing, production line and environmental reliability test.
- Designed for analyzing and testing power semiconductor, especially for Si/SiC MOSFET and IGBT parameter test.
Parameters
|
Voltage Source |
Voltage Measurement | |||
| Range | Programming Resolution | Accuracy (% + offset) |
Programming Resolution | Accuracy (% + offset) |
| 200V |
5mV |
±(0.03%+50mV) | 100uV | ±(0.05%+100mV) |
|
500V |
10mV | ±(0.03%+125mV) | 100uV | ±(0.05%+200mV) |
| 1500V | 40mV | ±(0.03%+375mV) |
1mV |
±(0.05%+600mV) |
| 3000V | 80mV | ±(0.03%+750mV) |
1mV |
±(0.05%+1.2V） |
|
Current Source |
Current Measurement | |||
| Range | Programming Resolution | Accuracy (% + offset) |
Programming Resolution | Accuracy (% + offset) |
| 1nA |
30fA |
±(0.1%+2E–12+Vo×1e–15) | 1fA | ±(0.1% + 1e–12 + Vo×5e–15) |
| 10nA | 300fA |
±(0.1%+5E–12+Vo×1e–15) |
10fA | ±(0.1% + 4e–12 + Vo×5e–15) |
| 100nA | 3pA | ±(0.1%+6E–11+Vo×1e–13) |
100fA |
±(0.1% + 7e–13 + Vo×1e–15) |
| 1uA | 30pA | ±(0.03%+700 pA) |
1pA |
±(0.08%+800 pA) |
| 10uA | 300pA | ±(0.03%+5 nA) |
10pA |
±(0.08%+3 nA) |
| 100uA | 3nA | ±(0.03%+60 nA) |
100pA |
±(0.05%+50 nA) |
| 1mA | 30nA | ±(0.03%+300 nA) |
1nA |
±(0.05%+400 nA) |
| 2mA | 60nA | ±(0.03%+1.2 µA) |
1nA |
±(0.05%+1 µA) |
| 20mA | 600nA | ±(0.03%+12 µA) |
10nA |
±(0.05%+10 µA) |
| 120mA | 3uA | ±(0.03%+36 µA) |
10nA |
±(0.05%+50 µA) |
Download
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